BibTeX
@MISC{Maria_fabricationof,
author = {Lisa Maria and Alexandra Taubensee Woodward},
title = {Fabrication of Novel Suspended Inductors},
year = {}
}
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Abstract
I hereby declare that I am the sole author of this thesis. This is a true copy of the thesis, including any required final revisions, as accepted by my examiners. I understand that my thesis may be made electronically available to the public. ii With the rapid growth in the wireless industry there has been increasing demand to make devices with better performance. This means lower power, lower voltage, smaller, and in general more efficient. This has lead to the interest in and necessity for good quality passive components. Good quality passive components make better filters, baluns, voltage controlled oscillators, and matching networks. There has been a lot of work over the last ten years focused on improving the quality of inductors. Typical inductors fabricated on silicon have Q factors of approximately 10. This is because silicon is conductive and therefore acts like a lossy ground plane and develops interfering currents. Improvements that have been attempted include thicker metal layers, thicker dielectric layers, patterned ground shields, as well as
