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Parallel-Resonator HF Micromechanical Bandpass Filters (1997)
| Venue: | in Proceedings of the Conference on Solid State Sensors and Actuators: TRANSDUCERS ’97 |
| Citations: | 4 - 2 self |
BibTeX
@INPROCEEDINGS{Clark97parallel-resonatorhf,
author = {John R. Clark and Frank D. Bannon Iii and Ark-chew Wong and Clark T. -c. Nguyen},
title = {Parallel-Resonator HF Micromechanical Bandpass Filters},
booktitle = {in Proceedings of the Conference on Solid State Sensors and Actuators: TRANSDUCERS ’97},
year = {1997},
pages = {1161--1164}
}
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Abstract
This paper describes an alternative mechanical filter architecture in which constituent micromechanical resonators are coupled electrically, rather than mechanically. By dispensing with rigid mechanical spring coupling, this parallel-resonator filter architecture both alleviates fabrication complexity associated with coupling springs (which often require submicron resolution for small filter bandwidths), and introduces real-time reconfigurability and bandwidth-tuning capabilities previously unavailable with spring-coupled architectures. After a brief introduction to parallel-resonator filter operation, this paper presents design equations for a variety of fourth-order bandpass filters, then verifies them via fabrication and testing of prototype bandpass filters centered at 14.5 MHz
Keyphrases
parallel-resonator hf micromechanical bandpass filter small filter bandwidth spring-coupled architecture fabrication complexity bandwidth-tuning capability submicron resolution brief introduction parallel-resonator filter architecture constituent micromechanical resonator introduces real-time reconfigurability parallel-resonator filter operation alternative mechanical filter architecture fourth-order bandpass filter rigid mechanical spring coupling prototype bandpass filter design equation
