DMCA
DESIGN AND MANUFACTURE OF MONOLITHIC, 3D COMPLIANT MECHANISMS FOR NANOMANIPULATION EQUIPMENT
by
Shih-chi Chen
,
Samuel Korb
BibTeX
@MISC{Chen_designand,
author = {Shih-chi Chen and Samuel Korb},
title = {DESIGN AND MANUFACTURE OF MONOLITHIC, 3D COMPLIANT MECHANISMS FOR NANOMANIPULATION EQUIPMENT},
year = {}
}
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Abstract
Compliant mechanisms provide motion/positioning via the compliance of the mechanism’s structure. Monolithic, or single piece compliant mechanisms (1) do not require assembly, (2) are capable of nanometer-level repeatability, (3) do not suffer from contact wear or friction and (4) exhibit low hysteresis. This technology is useful for instance in making compliant hexapods for Micro and Nanomanipulation. Hexapods are popular mechanisms used to achieve
