Abstract

Abstract—A two-axis microelectromechanical systems mi-cromirror actuator is developed for retinal scanning display and imaging applications. The device operation makes use of magnetostatic torque produced by the combination of a flux generating custom-made high-frequency electrocoil and the NiFe layer deposited on the movable part. Modeling of the actuation in the magnetic domain, as well as the experimental characterization of the mechanical part is described. The device is capable of full optical scan angles of 88 (at 100-mA root-mean-square coil current) and 1.8 for slow and fast-scan directions, respectively. In combination with a mirror size of 1.5 mm, resulting opt D products are 132mm and 2.7mm for slow and fast axis, re-spectively. Atmospheric operation of the device is enabled due to high mechanical quality factors of the order of 3000. Index Terms—Displays, electromagnetic actuator, microelec-tromechanical systems (MEMS), microsystems, microtechnology. I.