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Micro Contacts and Micro Manipulation with MEMS Actuator Arrays
BibTeX
@MISC{Böhringer_microcontacts,
author = {Karl-Friedrich Böhringer and Bruce Randall Donald},
title = {Micro Contacts and Micro Manipulation with MEMS Actuator Arrays},
year = {}
}
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Abstract
As improvements in fabrication technology for MEMS (micro electro mechanical systems) increase the availability and diversity of these micromachines, engineers are defining a growing number of tasks to which they can be put. The idea of carrying out tasks using coordinated systems of MEMS units motivates the development of automated, algorithmic methods for modeling, designing and controlling these devices. Parts contacts and parts handling at the micro scale pose new challenges to roboticists: With decreasing scale, forces proportional to the volume of objects (such as weight or inertia) decrease in comparison to surface forces (such as friction and sticking forces). We briefly describe these forces and discuss their effects on micro parts handling. Then we give an overview of our work on micro manipulation strategies. We describe how arrays of MEMS devices can move and position tiny parts, such as integrated circuit chips, in flexible and predictable ways by oscillatory or ciliary ac...
Keyphrases
mem actuator array micro contact micro manipulation micro scale fabrication technology new challenge mechanical system position tiny part micro part ciliary ac coordinated system part contact integrated circuit chip sticking force algorithmic method mem device mem unit micro manipulation strategy predictable way
