Abstract

Introduction Deterministic computer simulations of physical phenomena are becoming widely used in science and engineering. Computers are used to describe the flow of air over an airplane wing, combustion of gasses in a flame, behavior of a metal structure under stress, safety of a nuclear reactor, and so on. Some of the most widely used computer models, and the ones that lead us to work in this area, arise in the design of the semiconductors used in the computers themselves. A process simulator starts with a data structure representing an unprocessed piece of silicon and simulates the steps such as oxidation, etching and ion injection that produce a semiconductor device such as a transistor. A device simulator takes a description of such a device and simulates the flow of current through it under varying conditions to determine properties of the device such as its switching speed and the critical voltage at which it switches. A circuit simulator takes a list of devices and the

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