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Algorithmic MEMS (1998)
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BibTeX
@MISC{Böhringer98algorithmicmems,
author = {Karl Friedrich Böhringer and Bruce Randall Donald},
title = {Algorithmic MEMS},
year = {1998}
}
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Abstract
As improvements in fabrication technology for MEMS (microelectromechanical systems) increase the availability and diversity of these micromachines, engineers are defining a growing number of tasks to which they can be put. The idea of carrying out tasks using large coordinated systems of MEMS units motivates the development of automated, algorithmic methods for designing and controlling these groups of devices. We report here on progress towards algorithmic MEMS, taking on the challenge of design, control, and programming of massively-parallel arrays of microactuators. We report on these developments in this focused survey paper, based on the research results originally reported in our 1994 paper [26] and developed further in [22, 20, 27, 23, 18, 21, 19, 26, 12, 15, 16, 9]. We describe how arrays of MEMS devices can move and position tiny parts, such as integrated circuit chips, in flexible and predictable ways by oscillatory or ciliary action. The theory of programmable force fields...
Keyphrases
algorithmic mem progress towards algorithmic mem fabrication technology position tiny part integrated circuit chip focused survey paper research result programmable force field large coordinated system predictable way microelectromechanical system algorithmic method mem device massively-parallel array mem unit ciliary action
