Optical Communication Link Using Micromachined Corner Cube Reflector (1997)
| Citations: | 3 - 1 self |
BibTeX
@MISC{Chu97opticalcommunication,
author = {Patrick B. Chu and Nanping R. Lo and Erik C. Berg and Kristofer S. J. Pister},
title = {Optical Communication Link Using Micromachined Corner Cube Reflector},
year = {1997}
}
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Abstract
An optical communication link using a micromachined corner cube reflector (CCR) was demonstrated to transmit digital signals over a range of 2 meters by reflecting an interrogating laser from a 5mW laser source. The surface micromachined CCRs are made of 250¯m square hinged polysilicon plates and have measured reflectance ranging from 34% to 77% for different mirror designs. Light reflected by the CCRs has a divergence ranging from 15-35mrad. The CCRs are electrostatically actuated with 10 to 20V. The highest data rate transmitted with a CCR is 1K bps. Theoretical analysis and some dynamic optical test results of the device are presented. Keywords: Corner cube reflector, polysilicon, micro-optics, surface micromachining, serial communication, electrostatic actuator 1. INTRODUCTION 1 0 1 Laser Source Detector Beam Splitter Actuated CCR BASE STATION (Receiver) REMOTE STATION (Transmitter) Up Down Up Focusing Lens Figure 1. Schematic diagram of a communication system using CCR as an opti...
