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Design of microfabricated inductors for microprocessor power delivery (1999)
| Venue: | in IEEE Applied Power Electronics Conf. Proceedings |
| Citations: | 5 - 4 self |
BibTeX
@INPROCEEDINGS{Mehas99designof,
author = {G J Mehas and K D Coonley and C R Sullivan and Gustavo J Mehas and Kip D Coonley and Charles R Sullivan},
title = {Design of microfabricated inductors for microprocessor power delivery},
booktitle = {in IEEE Applied Power Electronics Conf. Proceedings},
year = {1999}
}
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Abstract
Abstract-Microfabricated inductor designs are proposed for converters for microprocessor power delivery. The fabrication process uses anisotropic silicon etching to form V-grooves; granular metal/insulator nanoscale composite magnetic materials; and copper conductors. An application specific calculation procedure results in an inductor design with predicted power density over 200 W/cm ¾ at 95% efficiency for an 8 MHz, 3.6 V to 1.1 V converter.
