Results 1 
3 of
3
ALAMODE: A Layered Architecture for Model Development
, 1995
"... To accurately simulate modern semiconductor process steps, TCAD tools must include a variety of physical models and numerical methods. Increasingly complex physical formulations are required to account for effects that were not important in previous generation of technology. As a specific example, t ..."
Abstract

Cited by 1 (1 self)
 Add to MetaCart
To accurately simulate modern semiconductor process steps, TCAD tools must include a variety of physical models and numerical methods. Increasingly complex physical formulations are required to account for effects that were not important in previous generation of technology. As a specific example, the impurity diffusion mechanisms owing to point defects and damage kinetics are not well understood, and thus flexibility in definition of models is highly desirable. An objectoriented approach has been applied to implementing a 123D finiteelement dialanoperator [1] PDE solver. The control interface is based on Tcl [2] and allows layered access to model definitions and solution techniques. 1. Configurable TCAD Framework To achieve a configurable and resuable TCAD framework, we have analyzed process simulation information flow carefully and separated the common functionalities such as the geometry/field server, the parameter/model library, and the visualization tools from the physical ...
Efficient 3D Mesh Adaptation in Diffusion Simulation
, 1996
"... Diffusion simulation is an important part in today's TCAD research. While many works have been done on 2D mesh adaptations in diffusion simulation [1] [2] [3], 3D mesh adapation remains a challenging area due to the excessive amount of grid points most mesh generation algorithms produce. In thi ..."
Abstract
 Add to MetaCart
(Show Context)
Diffusion simulation is an important part in today's TCAD research. While many works have been done on 2D mesh adaptations in diffusion simulation [1] [2] [3], 3D mesh adapation remains a challenging area due to the excessive amount of grid points most mesh generation algorithms produce. In this paper, we apply a generalized octree grid generation algorithm for mesh adaptation. It has the advantage of reducing the number of nodes necessary for accurate simulations. A generalized octree mesh generation algorithm [5] enables mesh refinement and derefinement in different directions at various regions. A vector level control function is computed and indicates the directions for which the refinement will be performed. In a contour based refinement scheme, the level control function indicates the directions as the gradient, while in an error estimator based scheme, it indicates the direction where the error will be maximally reduced. Every octant can be refined in either one, two or three di...
A Comprehensive Set of Tools for Solving Partial Differential Equations; Diffpack
, 1996
"... This chapter presents an overview of the functionality in Diffpack, which is a software environment for the numerical solution of partial differential equations. Examples on how objectoriented programming techniques are applied for software design and implementation are provided. In addition, w ..."
Abstract
 Add to MetaCart
This chapter presents an overview of the functionality in Diffpack, which is a software environment for the numerical solution of partial differential equations. Examples on how objectoriented programming techniques are applied for software design and implementation are provided. In addition, we present a collection of sample Diffpack applications. 1.1 Introduction The increase in computer power has enabled investigations of complicated mathematical models, thus leading to a demand for comprehensive numerical software. In the field of partial differential equations (PDEs) the software must deal with a large number of topics, including discretization schemes, numerical linear algebra, user interfaces, visualization and computer architecture. Moreover, the numerical solution of PDEs requires extensive computer power, and the software is subjected to extreme efficiency requirements. As a consequence, software development for PDEs is usually a comprehensive and timeconsuming proces...