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...st bending mode is more sensitive to the position of the deposited mass along the beam than the first torsional mode. Lobontiu et al. [10] extended this work to cantilever beam mass sensors. They presented an analytical model to estimate the resonance frequencies of the first bending and torsion modes and their sensitivities to variations in the mass. Their results show that the first torsional mode is more sensitive than the first bending mode to variations in the mass and its position along the beam. These results were verified experimentally on micro- and nano-scale cantilevers. Xie et al. [11] investigated sensitivity of dynamic mode cantilever beam micro mass sensors. They presented a model to predict the shift in the frequency of the first torsional mode as a function of the mass and attachment position of micro and nano objects. They also conducted an experiment to investigate the sensitivity of the frequencies of the first and second flexural and first torsional modes in air to a ragweed pollen located at different positions along the beam. Their experimental results showed that the sensitivity of the first torsional mode is an order of magnitude higher than that of the first b...

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...400 nm precision was required to detect 6.3 – 213.1 attograms of thiolate self-assembled monolayer systems [7]. Precise application of functional layers increases the sensitivity of cantilevers [8] – =-=[10]-=-, [11], reduces adhesion problems from functional layer expansion [12], and enables detection of multiple analytes on a single cantilever using higher order resonant modes [8] – [10], [13]. When using...