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Abstract: classes of pressure sensors, every new MEMS product idea is essentially a research project. During that research project, years can be spent developing prototypes which are then discarded. The result is an unacceptably long product development cycle or unnecessarily conservative design practices. The first step in reducing design time and allowing for aggressive design strategies is to develop simulation tools that will let designers try "what if" experiments in hours instead of months.... (Update)
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.... simulation problems left unsolved, developing a device level full 3 D fast solver would be the best answer to these tough challenges [32]. We have been working on developing a fast 3 D Stokes equation solver for applications in MEMS fluid simulations. The Stokes equation is...
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BibTeX entry: (Update)
S. D. Senturia, Narayan Aluru, J. White, "Simulating the behavior of MEMS devices: computational methods and needs," IEEE Computational Science & Engineering, pp.30-43, March 1997. 12 http://citeseer.ist.psu.edu/senturia97simulating.html More
@article{ senturia97simulating,
author = "Stephen D. Senturia and Narayan Aluru and Jacob White",
title = "Simulating the Behavior of {MEMS} Devices: Computational Methods and Needs",
journal = "IEEE Computational Science \& Engineering",
volume = "4",
number = "1",
month = "\slash",
pages = "30--43",
year = "1997",
url = "citeseer.ist.psu.edu/senturia97simulating.html" }
Citations (may not include all citations):715 GMRES: A Generalized Minimal Residual Algorithm for Solving .. (context) - Saad, Schultz - 1986
482 Iterative Solution of Nonlinear Equations in Several Variabl.. (context) - Ortega, Rheinboldt - 1970
408 Multi-Grid Methods and Applications (context) - Hackbusch - 1985
297 Fast Wavelet Transforms and Numerical Algorithms (context) - Beylkin, Coifman et al. - 1991
277 A Fast Algorithm for Particle Simulations - Greengard, Rokhlin - 1987
156 Computer Simulation Using Particles (context) - Hockney, Eastwood - 1988
102 Hybrid Krylov Methods for Nonlinear Systems of Equations (context) - Brown, Saad - 1990
100 Field Computation by Moment Methods (context) - Harrington - 1968
85 Rapid Solution of Integral Equations of Classical Potential .. (context) - Rokhlin - 1985
77 Numerical Continuation Methods (context) - Allgower, Georg - 1990
71 Fastcap: A Multipole Accelerated 3D Capacitance Extraction P.. (context) - Nabors, White - 1991
64 A Fast Adaptive Multipole Algorithm for Particle Simulations (context) - Carrier, Greengard et al. - 1988
49 A Hierarchical O(N log N) Force-Calculation Algorithm (context) - Barnes, Hut - 1986
36 Multilevel Computations of Integral Transforms and Particle .. (context) - Brandt - 1991
32 Boundary Element Techniques (context) - Brebbia, Telles et al. - 1984
30 Efficient Capacitance Calculations for Three-Dimensional Mul.. (context) - Ruehli, Brennan - 1973
29 Multilevel Matrix Multiplication and Fast Solution of Integr.. (context) - Brandt, Lubrecht - 1990
19 Boundary Integral and Singularity Methods for Linearized Vis.. (context) - Pozrikidis - 1992
17 Laplace's Equation and the Dirichlet-Neumann Map in Multiply.. (context) - Greenbaum, Greengard et al. - 1993
15 A Method of Local Corrections for Computing the Velocity Fie.. (context) - Anderson - 1986
15 A Computer-Aided Design System for Microelectromechanical Sy.. - Senturia - 1992
12 Integral Equations (context) - Mikhlin - 1957
11 Error Analysis of Boundary Integral Methods (context) - Sloan - 1992
11 Distribution of Sources and Normal Dipoles over a Quadrilate.. (context) - Newman - 1986
9 Efficient Capacitance Extraction of 3D Structures using Gene.. (context) - Phillips, White - 1994
8 Grid-Multipole Calculations (context) - Berman - 1995
6 CAD for Microelectromechanical Systems (context) - Senturia - 1996
5 Preconditioned, Adaptive, Multipole-Accelerated Iterative Me.. (context) - Nabors - 1994
5 A Coupled Numerical Technique for Self-Consistent Analysis o.. - Aluru, White - 1996
5 Convergence Properties of Relaxation Versus the Surface-Newt.. - Yie, Cai et al. - 1994
5 Calculation of High-Resolution SAR Distributions in Biologic.. (context) - Borup, Gandhi - 1985
4 Implementation of a MEMCAD System for Electrostatic and Mech.. - Gilbert - 1993
4 High-Order Corrected Trapezoidal Rules for Singular Function.. (context) - Kapur, Rokhlin - 1994
4 Software Tools for Designers of Sensor and Actuator CAE Syst.. (context) - Crary, Juma et al. - 1991
3 Micromachines on the March (context) - Bryzek, Petersen et al. - 1994
3 Direct-Newton FiniteElement /Boundary-Element Technique for .. - Aluru, White - 1996
3 Locally Corrected Multidimensional Quadrature Rules for Sing.. - Strain
2 Hindustan Publishing Corp (context) - Mikhlin, Equations - 1960
2 M-TEST: A Test Chip for MEMS Material Property Measurement u.. (context) - Osterberg, Senturia
2 Applied Mathematical Sciences Vol (context) - Kress, Equations - 1989
2 A Micromachined Vibrating Ring Gyroscope (context) - Putty, Najafi - 1994
1 The Rapid Evaluation of Potential Fields in Par (context) - Greengard - 1988
1 Accurate Numerical Integration of Singular Boundary Element .. (context) - Lean, Wexler - 1985
1 A Survey of Boundary Integral Equations for the Numerical So.. (context) - Atkinson - 1990
1 Precorrected-FFT Methods for Electromagnetic Analysis of Com.. - Phillips, White - 1995
1 A Computationally Practical Approach to Simulating Complex S.. - Yie - 1995
1 Preconditioning First and Second Kind Integral Formulations .. (context) - Tausch, White - 1996
1 Error Control in Numerical Solution of Boundary Integral Equ.. (context) - Hsiao, Kleinman - 1995
1 A Spectral Boundary Element Approach to Three-Dimensional St.. (context) - Muldowney, Higdon - 1995
1 A Low Cost Monolithic Accelerometer (context) - Sherman - 1992
1 IMEMS Modelling (context) - Korvink, Funk et al. - 1994
1 A Three Dimensional Higher Order Panel Method Based on B-Spl.. (context) - Manier - 1995
1 Boundary Element Methods with Wavelets and Mesh Refinement - Petersdorff, Schwab - 1996
1 Verification of FEM Analysis of Load-Deflection Methods for .. (context) - Pan - 1990
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