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"... Scatterometry proved to be a powerful technique for CD and profile metrology. In contrast to alternative methods like scanning electron microscopy (SEM) it is an integral method that reconstructs structure parameters from a comparison between measured and simulated spectra. It is well established in ..."
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the pitches and mode numbers in the two directions of periodic continuation can be selected freely. In this article, different measurement configurations are discussed regarding as an example an asymmetric crossed grating structure. The depth of an asymmetric etch ought to be measured as well as its width
Volume of Fluid (VOF) Method for the Dynamics of Free Boundaries
, 1981
"... Several methods have been previously used to approximate free boundaries in finite difference numerical simulations. A simple, but powerful, method is described that is based on the concept of a fractional volume of fluid (VOF). This method is shown to be more flexible and efficient than other metho ..."
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Cited by 603 (3 self)
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Several methods have been previously used to approximate free boundaries in finite difference numerical simulations. A simple, but powerful, method is described that is based on the concept of a fractional volume of fluid (VOF). This method is shown to be more flexible and efficient than other
Adaptive Constraint Satisfaction
- WORKSHOP OF THE UK PLANNING AND SCHEDULING
, 1996
"... Many different approaches have been applied to constraint satisfaction. These range from complete backtracking algorithms to sophisticated distributed configurations. However, most research effort in the field of constraint satisfaction algorithms has concentrated on the use of a single algorithm fo ..."
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Cited by 952 (43 self)
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Many different approaches have been applied to constraint satisfaction. These range from complete backtracking algorithms to sophisticated distributed configurations. However, most research effort in the field of constraint satisfaction algorithms has concentrated on the use of a single algorithm
An Energy-Efficient MAC Protocol for Wireless Sensor Networks
, 2002
"... This paper proposes S-MAC, a medium-access control (MAC) protocol designed for wireless sensor networks. Wireless sensor networks use battery-operated computing and sensing devices. A network of these devices will collaborate for a common application such as environmental monitoring. We expect senso ..."
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Cited by 1517 (36 self)
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sensor networks to be deployed in an ad hoc fashion, with individual nodes remaining largely inactive for long periods of time, but then becoming suddenly active when something is detected. These characteristics of sensor networks and applications motivate a MAC that is different from traditional
Medium Access Control with Coordinated Adaptive Sleeping for Wireless Sensor Networks
- IEEE/ACM Transactions on Networking
, 2004
"... This paper proposes S-MAC, a medium access control (MAC) protocol designed for wireless sensor networks. Wireless sensor networks use battery-operated computing and sensing devices. A network of these devices will collaborate for a common application such as environmental monitoring. We expect senso ..."
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Cited by 702 (15 self)
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sensor networks to be deployed in an ad hoc fashion, with nodes remaining largely inactive for long time, but becoming suddenly active when something is detected. These characteristics of sensor networks and applications motivate a MAC that is different from traditional wireless MACs such as IEEE 802
An Architecture for Wide-Area Multicast Routing
"... Existing multicast routing mechanisms were intended for use within regions where a group is widely represented or bandwidth is universally plentiful. When group members, and senders to those group members, are distributed sparsely across a wide area, these schemes are not efficient; data packets or ..."
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Cited by 534 (22 self)
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of receiver-initiated membership; (b) can be configured to adapt to different multicast group and network characteristics; (c) is not dependent on a specific unicast routing protocol; and (d) uses soft-state mechanisms to adapt to underlying network conditions and group dynamics. The robustness, flexibility
Recognition-by-components: A theory of human image understanding
- Psychological Review
, 1987
"... The perceptual recognition of objects is conceptualized to be a process in which the image of the input is segmented at regions of deep concavity into an arrangement of simple geometric components, such as blocks, cylinders, wedges, and cones. The fundamental assumption of the proposed theory, recog ..."
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Cited by 1272 (23 self)
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by human observers provide empirical support for the theory. Any single object can project an infinity of image configura-tions to the retina. The orientation of the object to the viewer can vary continuously, each giving rise to a different two-dimen-sional projection. The object can be occluded by other
Loopy belief propagation for approximate inference: An empirical study. In:
- Proceedings of Uncertainty in AI,
, 1999
"... Abstract Recently, researchers have demonstrated that "loopy belief propagation" -the use of Pearl's polytree algorithm in a Bayesian network with loops -can perform well in the context of error-correcting codes. The most dramatic instance of this is the near Shannon-limit performanc ..."
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Cited by 676 (15 self)
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. Again we found that loopy belief propagation always converged, with the average number of iterations equal to 8.65. The protocol for the ALARM network experiments dif fered from the previous two in that the structure and parameters were fixed -only the observed evidence differed between experimental
RCS -- a system for version control
, 1991
"... An important problem in program development and maintenance is version control, i.e., the task of keeping a software system consisting of many versions and configurations well organized. The Revision Control System (RCS) is a software tool that assists with that task. RCS manages revisions of text d ..."
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Cited by 456 (7 self)
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An important problem in program development and maintenance is version control, i.e., the task of keeping a software system consisting of many versions and configurations well organized. The Revision Control System (RCS) is a software tool that assists with that task. RCS manages revisions of text
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