motivates the development of automated, algorithmic methods for designing and controlling these groups of devices. We report here on progress towards algorithmic MEMS, taking on the challenge of design, control, and programming of massively-parallel arrays of microactuators. We report on these developments

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Initial results have been obtained for automatic synthesis of MEMS mask-layouts using a genetic algorithm. An initial random population of mask-layouts is produced. An initial fabrication process sequence is also generated. The fabrication of each geometrically valid layout is simulated using a 3-D

The performance of micro-electro-mechanical systems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately threedimensional and geometrically complicated. It is possible

fixed architecture. The architecture is a single-chip shared memory multiprocessor enhanced to allow thread and value speculation. Second, this paper presents a new dynamic partitioning algorithm called MEM-slicing. Insights into the development and operation of this algorithm are presented

algorithm has been developed for simulating complex electro-static MEMS actuators. The algorithm employs a time-efficient quasi-static non-linear corotational finite element solver, using a direct substitution iteration scheme. A general actuator model has been developed. The model consists of a movable

Abstract—The performance of micro-electro-mechanical sys-tems depends on the interaction between electrical, mechanical, and fluidic forces. Simulating this coupled problem is made more difficult by the fact that most MEMS devices are innately three-dimensional and geometrically complicated

A hierarchical MEMS synthesis and optimization architecture has been developed for MEMS design automation. The architecture integrates an object-oriented component library with a MEMS simulation tool and two levels of optimization: global genetic algorithms and local gradient-based refinement

Microelectromechanical resonators have been fabricated using the MUMPs process, and characterized. The results of this characterization study are used to provide valuable feedback to improve our MEMS design tool based on the use of evolutionary synthesis algorithms known as genetic algorithms

Abstract—Creating an environment for testing and verification of algorithms for navigation and orientation implemented in intelligent embedded systems is an essential step in a project development process. By testing several variants of algorithms, or a combination of the two lead to a reduced