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Abstract: A microspectrometer has been realized based on an array of Fabry--Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also a FWHM below 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a... (Update)
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BibTeX entry: (Update)
@misc{ correia-highselectivity,
author = "Jose Higino Correia and Marian Bartek and Reinoud F. Wolffenbuttel",
title = "High-Selectivity Single-Chip Spectrometer in Silicon for Operation at Visible
Part of the Spectrum",
url = "citeseer.ist.psu.edu/higinocorreia00highselectivity.html" }
Citations (may not include all citations):33 Device Electronics for Integrated Circuits (context) - Muller, Kamis - 1986
11 Thin-Film Optical Filters (context) - Macleod - 1986
10 Surface micromachined Fabry-Perot tunable filter (context) - Tran, Lo et al. - 1996
8 Progress in the development of a durable silver-based high-r.. (context) - Song, Sprague et al. - 1985
7 Simulating the behavior of MEMS devices: Computational metho.. - Senturia, Aluru et al. - 1997
6 Bulk-micromachined tunable Fabry-Perot microinterferometer f.. - Correia, Bartek et al. - 1998
6 A Fabry-Perot microinterferometer for visible wavelength (context) - Raley - 1992
5 High-selectivity single-chip spectrometer for operation at v.. - Correia, Bartek et al. - 1998
5 CMOS area image sensors with pixel level A/D conversion - Fowler - 1995
5 Optical properties of thin-film silicon-compatible materials (context) - Poenar, Wolffenbuttel - 1997
5 Photodiodes in silicon with an electrically-programmable UV .. (context) - Wolffenbuttel - 1990
4 Backside-illuminated silicon photodiode array for an integra.. (context) - Kwa, Sarro et al. - 1997
4 Miniature spectrometers for biochemical analysis (context) - Yee - 1997
3 Straylight compensation in thin-film Fabry-Perot optical fil.. (context) - Bartek, Correia et al. - 1999
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