Alternate document:   Details   Lossless Compression Techniques for Maskless Lithography Data Vito Dai, Avideh Zakhor

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Lossless Layout Compression for Maskless Lithography Systems (2000)  (Make Corrections)  (4 citations)
Vito Dai, Avideh Zakhor



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Abstract: Future lithography systems must produce more dense chips with smaller feature sizes, while maintaining throughput comparable to today's optical lithography systems. This places stringent data-handling requirements on the design of any maskless lithography system. Today's optical lithography systems transfer one layer of data from the mask to the entire wafer in about sixty seconds. To achieve a similar throughput for a direct-write maskless lithography system with a pixel size of 25 nm, data... (Update)

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...how to transfer 5 bit grayscale data to the mirrors, which as will be shown can be a major contributor to the area and power figures. In [2], non systolic architecture was proposed. 128 history buffers were implemented to improve the compression ratio. This chip was...

Cited by:   More
Evaluation of the New OASIS Format for Layout Fill.. - Chen, Kahng, Robins.. (2004)   (Correct)
Area Fill Generation With Inherent Data Volume Reduction - Yu Chen Andrew (2003)   (Correct)
Lossless Compression Techniques for Maskless Lithography Data - Dai, Zakhor   (Correct)

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BibTeX entry:   (Update)

V. Dai, A. Zakhor. "Lossless Layout Compression for Maskless Lithography Systems", Proceedings of the SPIE Emerging Lithographic Technologies IV, vol. 3997, March 2000. http://citeseer.ist.psu.edu/dai00lossless.html   More

@misc{ dai00lossless,
  author = "V. Dai and A. Zakhor",
  title = "Lossless Layout Compression for Maskless Lithography Systems",
  text = "V. Dai, A. Zakhor. Lossless Layout Compression for Maskless Lithography
    Systems, Proceedings of the SPIE Emerging Lithographic Technologies IV,
    vol. 3997, March 2000.",
  year = "2000",
  url = "citeseer.ist.psu.edu/dai00lossless.html" }
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1   Geometrical library recognition for mask data compression (context) - Veltman, Ashida - 1996
1   The methods of improving the compression ratio of LZ77 famil.. (context) - Yuanfu, Xunsen - 1996

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