Semiconductor Industry Association, National Technology Roadmap for Semiconductors. San Jose, CA: SIA, 1997. Home/Search Document Not in Database Summary Related Articles Check |
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.... The mutual electric eld #ux between neighboring interconnect lines results in a coupling (or fringing) capacitance [11 16] The coupling capacitance increases as the spacing between adjacent interconnect lines is reduced and or the aspect ratio of the interconnect thickness to width is increased [7,8]. The coupling capacitance may become comparable to the line to ground interconnect capacitance [14,16,17] Therefore, capacitive coupling has emerged as one of the primary issues in evaluating the signal integrity of CMOS integrated circuits [18 22] The importance of interconnect coupling ....
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