W. Pyka, R. Martins, and S. Selberherr, "Efficient algorithms for three-dimensional etching and deposition simulation," in Simulation of Semiconductor Processes and Devices, K. De Meyer and S. Biesemans, Eds. Leuven, Belgium: Springer, 1998, pp. 16--19. Home/Search Document Not in Database Summary Related Articles |
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IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED .. - Kinetics With Topography (1999) Self-citation (Pyka Selberherr) (Correct)
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W. Pyka, R. Martins, and S. Selberherr, "Efficient algorithms for three-dimensional etching and deposition simulation," in Simulation of Semiconductor Processes and Devices, K. De Meyer and S. Biesemans, Eds. Leuven, Belgium: Springer, 1998, pp. 16--19.
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