J. P. Chang, A. P. Mahorowala, and H. H. Sawin, "Plasma-surface kinetics and feature profile evolution in chlorine etching of polysilicon," J. Vac. Sci. Technol. A, vol. 16, no. 1, pp. 217--224, 1998. Home/Search Document Not in Database Summary Related Articles |
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IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED .. - Kinetics With Topography (1999) (Correct)
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J. P. Chang, A. P. Mahorowala, and H. H. Sawin, "Plasma-surface kinetics and feature profile evolution in chlorine etching of polysilicon," J. Vac. Sci. Technol. A, vol. 16, no. 1, pp. 217--224, 1998.
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