H. Fujita M. Ataka, A. Omodaka. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38--41, 1993. Pacifico, Yokohama, Japan. 132  Home/Search   Document Not in Database   Summary   Related Articles   Check

.... an object similar to the way in which a crowd moves a crowd surfer [1, 2, 3, 4, 5, 6] Many methods of actuation have been investigated ranging from air jets [7, 8, 9] electromagnetic actuators [10, 11, 12] piezoelectric actuators [13] electrostatic actuators [14] thermalbimorph actuators [15, 16, 17, 18, 19] and electrothermal actuators [20, 21] In principle, most of these systems could be transformed into moving microchip robots by simply flipping them over and operating them upside down. In actuality, problems such as power delivery, self supporting strength and heat dissipation arise, making ....

Ataka, M., Omodaka, A., and Fujita, H., 1993, "A Biomimetic Micro Motion System," Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, Pacifico, Yokohama, Japan, pp. 38--41.

....must adapt the continuous vector eld control to the real (and discrete) actuator array. For a good description of this approach, see Bohringer et al. [3] This approach is experimentally known to work in MEMS fabricated actuator arrays, where the array elements are small and close together [2, 13]. However, in cases where the actuators are far apart (i.e. the continuous actuation approximation is poor) or the coecient of friction is very high, the continuous approximation is known not to work as well (see Luntz et al. [12] In these cases, the continuous approximation does not ....

H. Fujita M. Ataka, A. Omodaka. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38-41, 1993. Pacico, Yokohama, Japan.

....where traditional pick and place operations are unlikely to succeed because of the small size and the possibly huge number of parts. Bohringer et al. designed, built, and programmed several kinds of microactuator arrays that can implement programmable force fields [11] 8] 9] Fujita et al. [3], 34] and Will et al. 36] 19] explored a number of different microactuator array designs and discussed algorithms for controlling them. Vibrating substrates and electrostatic force fields were used by Bohringer et al. 12] for parallel stochastic assembly of microfabricated components. Luntz ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers---Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, June 1993.

....part translate and rotate the part to an equilibrium con#guration. The manipulation requires no sensing. Current technology permits the implementation of certain vector #elds in the microscale with actuator arrays built in micro electro mechanical system #MEMS# technology #Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; Konishi and Fujita, 1994; B#ohringer et al. 1994; Liu and Will, 1995, for example#, and in the macroscale with transversely vibrating plates #B#ohringer et al. 1995#. The #exibility and dexterity that programmable vector #elds o#er has led researchers to investigate the extent to ....

....microfabricated actuator arrays based on MEMS #micro electro mechanical system# technology. These devices consist of a surface with potentially thousands or even millions of microscopic actuators, each of them capable of generating a unit force in a speci#c direction #Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; B#ohringer et al. 1994; Liu and Will, 1995, for example#. While MEMS actuator arrays may be useful to implement force #elds that require high spatial resolution, alternative #macroscopic# designs are possible as well. In the following subsections we give some speci#c design ....

Ataka, M., Omodaka, A., and Fujita, H. #1993#. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38#41, Paci#co, Yokohama, Japan.

....arrays present us with the abilitytoexplicitly program the applied force at every point in a vector #eld. Current technology permits the implementation of certain vector #elds in the microscale with actuator arrays built in micro electro mechanical system #MEMS# technology #Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; Konishi and Fujita, 1994; B#ohringer et al. 1994; Liu and Will, 1995; Cheung et al. 1997, for example#, and in the macroscale with vibrating plates #B#ohringer et al. 1995; Reznik and Canny, 1998#. The B#ohringer et al. Unique Part Orientation in Programmable Force Fields ....

....microfabricated actuator arrays based on MEMS #micro electro mechanical system# technology. These devices consist of a surface with potentially thousands or even millions of microscopic actuators, each of them capable of generating a unit force in a speci#c direction #Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; B#ohringer et al. 1994; Liu and Will, 1995, for example#. While MEMS actuator arrays may be useful to implement force #elds that require high spatial resolution, alternative #macroscopic# designs are possible as well. In the following subsections we give some speci#c design ....

Ataka, M., Omodaka, A., and Fujita, H. #1993#. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38#41, Paci#co, Yokohama, Japan.

.... Konishi and Fujita, 1994; Mita et al. 1997#, electromagnetic actuators #Liu et al. 1995; Liu and Will, 1995; Nakazawa et al. 1997#, piezoelectric actuators #Furuhata et al. 1991#, electrostatic actuators #B#ohringer et al. 1996#, and thermal bimorph actuators #Takeshima and Fujita, 1991; Ataka et al. 1993; Suh et al. 1997#. Whatever the chosen actuation method, the actuators have two fundamental requirements: #1# the generation of enough force or torque to move not only themselves, but also to move external objects and #2# the generation of large displacements of the moving parts or of the media ....

Ataka, M., Omodaka, A., and Fujita, H. #1993#. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38#41, Paci#co, Yokohama, Japan.

....of freedom, and force output) through the arrangement of actuators in series or parallel. A variety of actuation methods have been used including air jets [16, 10, 14] electromagnetic actuators [11, 12, 15] piezoelectric actuators [9] electrostatic actuators [3] and thermal bimorph actuators [19, 1, 18]. Whatever the chosen actuation method, the actuators have two fundamental requirements: 1) the generation of enough force or torque to move not only themselves, but also to move external objects and (2) the generation of large displacements of the moving parts or of the media in which the parts ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....present us with the ability to explicitly program the applied force at every point in a vector field. Current technology permits the implementation of certain vector fields in the microscale with actuator arrays built in micro electro mechanical system (MEMS) technology (Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; Konishi and Fujita, 1994; Bohringer et al. 1994; Liu and Will, 1995; Cheung et al. 1997, for example) and in the macroscale with vibrating plates (Bohringer et al. 1995; Reznik and Canny, 1998) The Bohringer et al. Unique Part Orientation in Programmable Force Fields ....

....microfabricated actuator arrays based on MEMS (micro electro mechanical system) technology. These devices consist of a surface with potentially thousands or even millions of microscopic actuators, each of them capable of generating a unit force in a specific direction (Pister et al. 1990; Ataka et al. 1993; Fujita, 1993; Bohringer et al. 1994; Liu and Will, 1995, for example) While MEMS actuator arrays may be useful to implement force fields that require high spatial resolution, alternative (macroscopic) designs are possible as well. In the following subsections we give some specific design ....

Ataka, M., Omodaka, A., and Fujita, H. (1993). A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan.

....integrated, monolithic mirror array for video projections has been presented by Sampsell [25] Bohringer et al. 7] have developed a theory of manipulation and control for micro actuator arrays. Konishi and Fujita [12] use controlled, directed micro air valves to convey small objects. Ataka et al. [1] simulate cilia with An earlier, shorter version of this paper has been presented at the IEEE Workshop on Micro Electo Mechanical Systems. Figure 1: A large unidirectional actuator array (scanning electron microscopy) Each actuator is 180 Theta 240 m 2 in size. Detail from a 1 in 2 ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....position. Then the two phase gait to effect motion in the East direction would be news neWs (see Figure 10) The four phase gait consists of four different actuation phases news neWs nEWs nEws such that motion is induced during upward as well as downward strokes of the cilia (Figure 11, see also [3]) Note that the up (off) down (on) motion 2 1 news neWs motion 3 4 nEWs nEws Figure 11: Four phase gait consisting of the four pattern sequence news neWs nEWs nEws. forces exerted on the moving part depend on the state of the motion pixel: e.g. in the transition from phase 1 to phase 2 the ....

Manabu Ataka, Akito Omodaka, and Hiroyuki Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....where traditional pick and place operations are unlikely to succeed because of the small size and the possibly huge number of parts. B ohringer and Donald designed, built, and programmed several kinds of micro actuator arrays that can implement programmable force fields [11, 8, 9] Fujita et al. [3, 33] and Will et al. 34, 18] explored a number of different micro actuator array designs and discussed algorithms for controlling them. Vibrating substrates and electrostatic force fields were used by B ohringer et al. 7] for parallel stochastic assembly of microfabricated components. Luntz, ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....actuator modules. Konishi and Fujita [16] and Fujita [9] address distributed control strategies for actuator arrays. Furuhata et al. 10] have built arrays of ultrasonic microactuators. Konishi and Fujita [15] use air flow controlled by microvalves to both levitate and move objects. Ataka et al. [2] use thermobimorph cantilever beams to mimic the motion and function of cilia. Due to low friction in the air bearing, motion induced with designs [19] and [15] is fast but hard to control because of the lack of damping. Design [2] allows more control but operates at low frequencies ( 1Hz) Our ....

....by microvalves to both levitate and move objects. Ataka et al. 2] use thermobimorph cantilever beams to mimic the motion and function of cilia. Due to low friction in the air bearing, motion induced with designs [19] and [15] is fast but hard to control because of the lack of damping. Design [2] allows more control but operates at low frequencies ( 1Hz) Our design is closest to Furuhata s [10] with slightly larger devices and a larger range of out ofplane motion. It combines controlled actuator object interaction with high operation speed. It is based on microfabricated torsional ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38-- 41, Pacifico, Yokohama, Japan, June 1993.

....principles for micro manipulation systems have been proposed in recent years. Pister et al. 10] presented a levitation system consisting of microfabricated nozzles, and electrostatic actuation. Konishi and Fujita [6] use controlled, directed micro air valves to convey small objects. Ataka et al. [1] simulate cilia with thermal bimorph micro structures. Liu et al. 7] propose a micro assembly system based on magnetic actuator arrays. Electrostatic actuator arrays are described by B ohringer et al. 5] and Storment et al. 14] An important issue are the device design trade offs between range ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38-- 41, Pacifico, Yokohama, Japan, June 1993.

....in North East and South West directions. motion in the East direction would be news neWs (see Figure 10) The four phase gait consists of four different actuation phases news neWs nEWs nEws such that motion is induced during upward as well as downward strokes of the cilia (Figure 11, see also [3]) Note that the forces exerted on the moving part depend on the state of the motion pixel: e.g. in the transition from phase 1 to phase 2 the cilium W moves up while the opposing cilium e remains down. We denote the lateral force exerted on the part in this configuration f W;e . Analogously, ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38-- 41, Pacifico, Yokohama, Japan, June 1993.

....position. Then the two phase gait to effect motion in the East direction would be news neWs (see Figure 7) The four phase gait consists of four different actuation phases news neWs nEWs nEws such that motion is induced during upward as well as downward strokes of the cilia (Figure 8, see also [1]) Note that the forces exerted on the moving part depend on the state of the motion pixel: e.g. in the transition from phase 1 to phase 2 the cil down (on) up (off) motion 1 2 news neWS motion 3 4 NEWS NEws Figure 9: Diagonal (virtual) gait consisting of the four pattern sequence news neWS ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....position. Then the two phase gait to effect motion in the East direction would be news neWs (see Figure 12) The four phase gait consists of four different actuation phases news neWs nEWs nEws such that motion is induced during upward as well as downward strokes of the cilia (Figure 13, see also [6]) Note that the forces exerted on the moving part depend on the state of the motion pixel: e.g. in the transition from phase 1 to phase 2 the cilium W moves up while the opposing cilium e remains down. We denote the lateral force exerted on the part in this configuration f W;e . Analogously, ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....the concept of a distributed micro motion system (DMMS) that consists of an array of cooperating actuator modules. Furuhata et al. 6] have built arrays of ultrasonic microactuators. Konishi and Fujita [11] use air flow controlled by microvalves to both levitate and move objects. Ataka et al. [2] use thermobimorph cantilever beams to mimic the motion and function of cilia. Due to low friction in the air bearing, motion induced with designs [15] and [11] is fast but hard to control because of the lack of damping. Design [2] allows more control but operates at low frequencies ( 1Hz ) Our ....

....by microvalves to both levitate and move objects. Ataka et al. 2] use thermobimorph cantilever beams to mimic the motion and function of cilia. Due to low friction in the air bearing, motion induced with designs [15] and [11] is fast but hard to control because of the lack of damping. Design [2] allows more control but operates at low frequencies ( 1Hz ) Our design is closest to Furuhata s [6] with slightly larger devices and a larger range of out of plane motion. It combines controlled actuator object interaction with high operation speed. Our actuators are based on microfabricated ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid- State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

....motion 3 4 nEWs nEws Figure 11: Four phase gait consisting of the four pattern sequence news neWs nEWs nEws. The four phase gait consists of four different actuation phases news neWs nEWs nEws such that motion is induced during upward as well as downward strokes of the cilia (Figure 11, see also [2]) Note that the forces exerted on the moving part depend on the state of the motion pixel: e.g. in the transition from phase 1 to phase 2 the cilium W moves up while the opposing cilium e remains down. We denote the lateral force exerted on the part in this configuration f W;e . Analogously, ....

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

No context found.

H. Fujita M. Ataka, A. Omodaka. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38--41, 1993. Pacifico, Yokohama, Japan. 132

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H. Fujita M. Ataka, A. Omodaka. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38--41, 1993. Pacifico, Yokohama, Japan.

No context found.

H. Fujita M. Ataka, A. Omodaka. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38--41, 1993. Pacifico, Yokohama, Japan.

No context found.

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers - Digest International Conference on Solid State Sensors and Actuators, pages 38--41, 1993. Pacifico, Yokohama, Japan.

No context found.

M. Ataka, A. Omodaka, and H. Fujita, "A Biomimetic Micro Motion System," Transducers: Digest Int'l Conf. on Solid-State Sensors and Actuators [Pacifico, Yokohama, Japan], June 1993, pp. 38--41.

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Ataka, M., A. Omodaka, and H. Fujita, A biomimetic micro motion system, in Transducers '93 Dig. 7th Int. Conf. on Solid State Sensors and Actuators. 1993. Pacifico, Yokohama, Japan.

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M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers -- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38-41, Pacifico, Yokohama, Japan, June 1993.

No context found.

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

No context found.

M. Ataka, A. Omodaka, and H. Fujita, "A biomimetic micro motion system," in Transducers '93 Dig. 7th Int. Conf. on Solid State Sensors and Actuators, Pacifico, Yokohama, Japan, June 1993, pp. 38--41.

No context found.

M. Ataka, A. Omodaka, and H. Fujita, "A biomimetic micro motion system," in Transducers '93 Dig. 7th Int. Conf. on Solid State Sensors and Actuators, Pacifico, Yokohama, Japan, June 1993, pp. 38--41.

No context found.

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

No context found.

M. Ataka, A. Omodaka, and H. Fujita. A biomimetic micro motion system. In Transducers --- Digest Int. Conf. on Solid-State Sensors and Actuators, pages 38--41, Pacifico, Yokohama, Japan, June 1993.

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