R. Veltman, L. Ashida, "Geometrical library recognition for mask data compression", Proceedings of the SPIE -- The International Society of Optical Engineering 2793, pp.418-426, SPIE, 1996. Home/Search Document Not in Database Summary Related Articles |
This paper is cited in the following contexts:
Lossless Layout Compression for Maskless Lithography Systems - Dai, Zakhor (2000) (3 citations) (Correct)
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R. Veltman, L. Ashida, "Geometrical library recognition for mask data compression", Proceedings of the SPIE -- The International Society of Optical Engineering 2793, pp.418-426, SPIE, 1996.
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