Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., Los Angeles, June 2000, pp. 671-674.  Home/Search   Document Details and Download   Summary   Related Articles   Check

....thus control post CMP topography variation. However, inserting dummy features of a prescribed density ad hoc, wherever there is empty space in layout that is large enough, is neither effective nor efficient. Recent studies on inter layer dielectric (ILD) CMP are based on linear models oxide polish [5,6,8]. Specifically, global density assignment followed by local insertion, proposed by Tian et al. to solve the dummy feature placement problem in the fixed dissection regime with both single layer and multiple layer considerations, gave excellent results by reducing simulated post CMP topography ....

Chen, Y., Kahng, A., Robins, G., and Zelikovsky, A. Practical Iterated Fill Synthesis for CMP Uniformity. In Proc. 37 Design Automation Conference, (Los Angeles, California, June 2000), 671-674.

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Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., Los Angeles, June 2000, pp. 671-674.

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Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. ACM/IEEE Design Automation Conf., Los Angeles, June 2000, pp. 671-674.

....proposed in [25] models the design side in that it seeks to minimize the coupling capacitance and the uncertainty caused by filling. Algorithms for filling flat designs can be classified into two cate gories: linear programming (LP) based approaches [12] 25] and Monte Carlo based methods [4] [5] B. Hierarchical Filling Hierarchy arises in both custom and semi custom design flows. In custom design, hierarchy is used mostly for streamlining the management and the decomposition of the design problem. In semi custom design, hierarchy is associated more with reuse of standard cells, ....

Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., Los Angeles, June 2000, pp. 671-674.

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Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., Los Angeles, June 2000, pp. 671-674.

....formulations. The LP formulations for filling were first proposed by Kahng et al. in [6] and adapted to other objectives and CMP models in [12, 13] ffl Greedy methods which iteratively find the best tile for the next filling geometry to be added into the layout. These methods were first used in [3] for ILD thickness control, and also used for shallow trench isolation (STI) CMP model in [13] ffl Monte Carlo (MC) methods, which are similar to greedy methods but insert the next filling geometry randomly. Due to its efficiency and accuracy, these were used for both flat [3, 4] and ....

....first used in [3] for ILD thickness control, and also used for shallow trench isolation (STI) CMP model in [13] ffl Monte Carlo (MC) methods, which are similar to greedy methods but insert the next filling geometry randomly. Due to its efficiency and accuracy, these were used for both flat [3, 4] and hierarchical [2] layout density control; and ffl Iterated Greedy (IGreedy) and Iterated Monte Carlo (IMC) methods, which improve the solution quality by iterating the insertions and deletions of dummy fill features with respect to the density variation ( 3] The motivation for our present ....

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Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., Los Angeles, June 2000, pp. 671-674.

....Monte Carlo and linear programming based approaches. I. Introduction To improve manufacturability and performance predictability, modern design methodologies must make layouts uniform with respect to feature density criteria, by inserting dummy fill geometries into layouts. According to [1], the so called Filling Problem may be defined as follows: The Filling Problem: Given a design rule correct layout in an n Theta n layout region, along with a window size w n, and upper (U) and lower (L) bounds on the feature density in any window, add dummy fill geometries to create a filled ....

.... proposed in [8] is based on the determination of the effective initial pattern density, and is easy to calibrate [11] An approach that unifies the two pattern density definitions studied in [5] and [12] enables the application of the same layout density control methods to both scenarios [1] (the pattern density is a local property and therefore depends at each point on the neighboring spatial pattern density) A standard practice in discretizing the filling problem is to consider only windows (i.e. floating rectangle region of given size) from a fixed dissection. However, bounding ....

[Article contains additional citation context not shown here]

Y. Chen, A. B. Kahng, G. Robins and A. Zelikovsky, "Practical Iterated Fill Synthesis for CMP Uniformity", Proc. Design Automation Conf., June 2000, pp. 671-674.

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