| S. Senturia, "CAD Challenges for Microsensors, Microactuators, and Microsystems," Proceedings of the IEEE, Vol. 86, No. 8, Aug. 1998, pp.1611-1626. |
....and design [6] 21] 24] 28] integrates heterogeneous modeling techniques to achieve scalable designs. Among heterogeneous modeling techniques, the integration of continuous and discrete dynamics has received attention in system theory [3] 18] micro electromechanical devices and systems (MEMS) [29], computer aided design (CAD) 2] 5] 30] and automatic control [7] 31] among other communities. Two kinds of integration have been widely accepted by modeling and design theories and practices the mixed signal style that integrates continuous time differential equations with timebased ....
S. Senturia, "CAD Challenges for Microsensors, Microactuators, and Microsystems," Proceedings of the IEEE, Vol. 86, No. 8, Aug. 1998, pp.1611-1626.
....and the gas film forces. 2. 1 Electrical equivalencies The use of electrical equivalencies is a widely applied approach in the field of, e.g. mechanical engineering [2] thermal design [3] and acoustics [4] Recently, several papers in the field of micromechanics have also been published [5, 6, 7, 8, 9, 10, 11, 12]. The equivalent circuits of sensors are usually built from linear resistors, capacitors, inductors and transformers, that is, models for real world passive components. Here, on the contrary, the equivalent circuits are built from fundamental elements of the circuit simulator used, namely, ....
S. D. Senturia, "CAD challenges for microsensors, microactuators, and microsystems, " Proceedings of the IEEE, vol. 86, pp. 1611--1626, 1998.
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S. D. Senturia: "CAD Challenges for Microsensors, Micro-actuators, and Microsystems", Proceedings of the IEEE, Vol. 86, No. 8, Aug. 1998, pp.1611-1626
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